Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN 1.3 coatings prepared by low temperature plasma enhanced chemical vapor deposition

Author： Jedrzejowski P.   Klemberg-Sapieha J.E.   Martinu L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.426, Iss.1, 2003-02, pp. : 150-159

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