SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors

Author： Smirnova T.P.   Badalian A.M.   Yakovkina L.V.   Kaichev V.V.   Bukhtiyarov V.I.   Shmakov A.N.   Asanov I.P.   Rachlin V.I.   Fomina A.N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 144-151

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