Nitrogen as background gas in pulsed-laser deposition growth of indium tin oxide films at room temperature

Author： Morales-Paliza M.A. Huang M.B. Feldman L.C.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 220-224

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