Deposition and structural characterization of poly-Si thin films on Al-coated glass substrates using hot-wire chemical vapor deposition

Author: Ebil O.   Aparicio R.   Hazra S.   Birkmire R.W.   Sutter E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 120-124

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Abstract