Epitaxial growth of strained Si 1-y C y films by the hot-wire cell method and its application to metal oxide semiconductor devices

Author： Watahiki T. Abe K. Yamada A. Konagai M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 283-286

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