Low temperature epitaxial growth of Si and Si 1-y C y films by hot wire cell method

Author: Watahiki T.   Abe K.   Tamura H.   Miyajima S.   Yamada A.   Konagai M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 221-224

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Abstract