Preparation of B-doped a-Si 1-x C x :H films and heterojunction p-i-n solar cells by the Cat-CVD method

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Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 245-248

Elsevier

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Preparation of SiO 2 thin films using the Cat-CVD method

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Excited helium-induced CVD of a-Si 1-x C x :H films from trimethylchlorosilane

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Properties of a-Si 1-x C x :H thin films deposited from the organosilane Triethylsilane

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Quantitative analysis of a-Si 1-x C x :H thin films by vibrational spectroscopy and nuclear methods

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