Effect of hydrogen radical on growth of c-Si in hetero-structured SiC x alloy films

Author: Itoh T.   Fukunaga K.   Fujiwara T.   Nonomura S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 33-36

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Abstract