Hot-wire chemical vapor deposition of high hydrogen content silicon nitride for solar cell passivation and anti-reflection coating applications

Author: Holt J.K.   Goodwin D.G.   Gabor A.M.   Jiang F.   Stavola M.   Atwater H.A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 37-40

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Abstract