Development of Cat-CVD apparatus for 1-m-size large-area deposition

Author： Ishibashi K.   Karasawa M.   Xu G.   Yokokawa N.   Ikemoto M.   Masuda A.   Matsumura H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 58-62

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