Determination of the electron temperature profile above the evaporative source in an ion plating discharge by spatially resolved optical emission spectroscopy

Author： Wilson A.D.   Davison A.   Leyland A.   Matthews A.   Fancey K.S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.434, Iss.1, 2003-06, pp. : 157-161

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