Effective electromechanical coupling coefficient (kt 2 ) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film

Author： Takeuchi M.   Yamada H.   Yoshino Y.   Makino T.   Arai S.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 463-466

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