Effect of the substrate bias potential on crystalline grain size, intrinsic stress and hardness of vacuum arc evaporated TiN/c-Si coatings

Author: Espinoza-Beltran F.J.   Che-Soberanis O.   Garcia-Gonzalez L.   Morales-Hernandez J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.437, Iss.1, 2003-08, pp. : 170-175

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Abstract