The effect of deposition parameters on the properties of yttria-stabilized zirconia thin films

Author: Ruddell D.E.   Stoner B.R.   Thompson J.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.445, Iss.1, 2003-11, pp. : 14-19

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Abstract