Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film

Author： Jung Y.S.   Seo J.Y.   Lee D.W.   Jeon D.Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.445, Iss.1, 2003-11, pp. : 63-71

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