The influence of surface topographic features on angular distribution of sputtered atoms

Author： Zhenxia W.   Jisheng P.   Jiping Z.   Zhenlan T.   Wenmin W.   Huiming Z.   Yuewu Z.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.46, Iss.3, 1995-03, pp. : 247-250

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