Angular distribution of atoms sputtered from silicon by 1-10 keV Ar ions

Author: Chernysh V. S.   Kulikauskas V. S.   Patrakeev A. S.   Abdul-cader K. M.   Shulga V. I.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.159, Iss.3, 2004-03, pp. : 149-155

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Abstract