Angular distribution of atoms sputtered from germanium by 1â–“20ÂkeV Ar ions

Author: Chernysh V. S.   Patrakeev A. S.   Shulga V. I.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.161, Iss.12, 2006-12, pp. : 701-707

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Abstract