Bohm criterion in magnetron plasma

Author: Szikora B.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.61, Iss.2, 2001-05, pp. : 397-401

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract