Secondary ion emission from silicon under 8 keV O 2 + and Ar + ion bombardment

Author: Huan C.H.A.   Wee A.T.S.   Low H.S.M.   Tan K.L.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.2, 1996-02, pp. : 119-127

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Abstract