The effect of nitrogen content on the structure and mechanical properties of TiN films produced by magnetron sputtering

Author： Arnell R.D. Colligon J.S. Minnebaev K.F. Yurasova V.E.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.5, 1996-05, pp. : 425-431

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