Composite metal/C:H films prepared in an unbalanced magnetron

Author: Biederman H.   Slavinska D.   Stundzia V.   Howson R.P.   Zemek J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.48, Iss.10, 1997-10, pp. : 883-886

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract