Characterization of an unbalanced magnetron for composite film (metal/C:H) deposition

Author： Biederman H.   Stundzia V.   Slavnska D.   Glosk J.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.52, Iss.4, 1999-04, pp. : 415-420

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