Synthesis and characterization of conductive titanium monoxide films. Diffusion of silicon in titanium monoxide films

Author: Grigorov K.G.   Grigorov G.I.   Drajeva L.   Bouchier D.   Sporken R.   Caudano R.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.2, 1998-10, pp. : 153-155

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Abstract