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Elsevier

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Influence of vacuum rapid thermal annealing on the properties of Al and Ag films on quartz

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Influence of vacuum rapid thermal annealing on the properties of PCVD SiO 2 and SiO 2 .P 2 O 5 films

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Vacuum, Vol. 58, Iss. 2, 2000-08 ,pp. : 485-489

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Composition, structure and annealing-induced phase separation in SiO x films produced by thermal evaporation of SiO in vacuum

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