Microhardness evaluation of Cu-Ni multilayered films by X-ray diffraction line profile analysis

By Shan F.L.   Gao Z.M.   Wang Y.M.  

Thin Solid Films, Vol. 324, Iss. 1, 1998-07 ,pp. : 162-164

Elsevier

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The use of in situ X-ray diffraction, optical scattering and resistance analysis techniques for evaluation of copper diffusion barriers in blanket films and damascene structures

By Cabral Jr. C.   Lavoie C.   Harper J.M.E.   Jordan-Sweet J.  

Thin Solid Films, Vol. 397, Iss. 1, 2001-10 ,pp. : 194-202

Elsevier

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Profile analysis of thin film X-ray diffraction peaks

By Bimbault L.   Badawi K.F.   Goudeau P.   Durand N.   Branger V.  

Thin Solid Films, Vol. 275, Iss. 1, 1996-04 ,pp. : 40-43

Elsevier

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Structural analysis of Co-Cr alloy films by X-ray diffraction

By Zhou Z.-F.   Fan Y.-D.  

Thin Solid Films, Vol. 339, Iss. 1, 1999-02 ,pp. : 95-101

Elsevier

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Analysis of X-ray photoelectron spectra of amorphous carbon nitride films

By Song H.   Ilegbusi O.J.  

Thin Solid Films, Vol. 388, Iss. 1, 2001-06 ,pp. : 114-119

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