Advanced plasma processing techniques for metallization in giga scale technology

Author: Dixit G.A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.4, 1998-12, pp. : 723-727

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract