Advanced plasma technology in microelectronics

Author: Jung C.O.   Chi K.K.   Hwang B.G.   Moon J.T.   Lee M.Y.   Lee J.G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 112-119

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract