Synthesis of nanosize Si-C-N powder in low pressure plasmas

Author： ujar J.L.   Viera G.   Polo M.C.   Maniette Y.   Bertran E.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.52, Iss.1, 1999-01, pp. : 153-156

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