Nanometric powder of stoichiometric silicon carbide produced in square-wave modulated RF glow discharges

Author: Viera G.   Sharma S.N.   ujar J.L.   Zhang R.Q.   Costa J.   Bertran E.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.52, Iss.1, 1999-01, pp. : 183-186

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Abstract