Author: Inayoshi S.S. Sato Y. Saito K. Tsukahara S. Hara Y. Amano S. Ishizawa K. Nomura T. Shimada A. Kanazawa M.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 325-328
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Abstract
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