Preparation of argon-free refractory thin films using RF-DC coupled magnetron sputtering

Author： Petrov P.K. Hollmann E.K. Volpyas V.A. Volpyas A.V. Tanaka T. Kawabata K.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.1, 1999-05, pp. : 37-39

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