Low temperature growth of r.f. reactively planar magnetron-sputtered AlN films

By Penza M.   De Riccardis M.F.   Mirenghi L.   Tagliente M.A.   Verona E.  

Thin Solid Films, Vol. 259, Iss. 2, 1995-04 ,pp. : 154-162

Elsevier

Access to resources Recommend Favorite

Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO 2 and SiO 2 films for process control

By Vergohl M.   Malkomes N.   Staedler T.   Matthee T.   Richter U.  

Thin Solid Films, Vol. 351, Iss. 1, 1999-08 ,pp. : 42-47

Elsevier

Access to resources Recommend Favorite

Effects of ion flux on the properties of dc magnetron-sputtered stainless steel films

By Inoue S.   Saeki T.   Uchida H.   Koterazawa K.   Iwasa M.  

Vacuum, Vol. 66, Iss. 3, 2002-08 ,pp. : 257-261

Elsevier

Access to resources Recommend Favorite

Deposition and Characterization of Reactive Magnetron Sputtered Tungsten Carbide Films

By  

Materials Science Forum, Vol. 2017, Iss. 898, 2017-07 ,pp. : 1505-1511

Trans Tech Publications

Access to resources Recommend Favorite

In situ monitoring of sputtered zinc oxide films for piezoelectric transducers

By Zayer N.K.   Greef R.   Rogers K.   Grellier A.J.C.   Pannell C.N.  

Thin Solid Films, Vol. 352, Iss. 1, 1999-09 ,pp. : 179-184

Elsevier

Access to resources Recommend Favorite