Angular dependences of surface composition, sputtering and ripple formation on silicon under N 2 + ion bombardment

Author: Bachurin V.I.   Lepshin P.A.   Smirnov V.K.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.56, Iss.4, 2000-03, pp. : 241-245

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Abstract