Composition, structure and annealing-induced phase separation in SiO x films produced by thermal evaporation of SiO in vacuum

Author： Nesheva D. Bineva I. Levi Z. Aneva Z. Merdzhanova T. Pivin J.C.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.68, Iss.1, 2002-10, pp. : 1-9

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