Characterization of photoluminescence of a-Si:H nanoball films fabricated by microwave plasma CVD

Author： Kato I. Kezuka H. Matsumoto T. Saito R. Suzuki T.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.65, Iss.3, 2002-05, pp. : 439-442

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