Cathodic arc deposition with activated anode (CADAA) for preparation of in situ doped thin solid films

Author: Takikawa H.   Kimura K.   Miyano R.   Sakakibara T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.65, Iss.3, 2002-05, pp. : 433-438

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Abstract