cBN Films grown by hot filament assisted microwave electron cyclotron resonance CVD

Author: Zhang S.J.   Chen G.H.   Deng J.X.   Zhang D.X.   Ren W.   Wang B.   Yan H.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.66, Iss.1, 2002-06, pp. : 65-70

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract