Interfacial properties of a hetero-structure YSZ/p-(100)Si prepared by magnetron sputtering

By Jeon S.   Takanori M.   Unno A.   Wasa K.   Ichikawa Y.   Hwang H.  

Vacuum, Vol. 65, Iss. 1, 2002-02 ,pp. : 19-25

Elsevier

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Relationship between structure and mechanical properties in hard Al-Si-Cu-N films prepared by magnetron sputtering

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Thin Solid Films, Vol. 413, Iss. 1, 2002-06 ,pp. : 121-130

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Improvement of the electrical properties of heteroepitaxial yttria-stabilized zirconia (YSZ) films on Si prepared by reactive sputtering

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Vacuum, Vol. 59, Iss. 2, 2000-11 ,pp. : 390-396

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Structure and characteristics of ZnO:Al/n-Si heterojunctions prepared by magnetron sputtering

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Thin Solid Films, Vol. 422, Iss. 1, 2002-12 ,pp. : 180-185

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Dependence on substrate temperature of the film structure of c-Si:H prepared by RF magnetron sputtering

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Vacuum, Vol. 66, Iss. 3, 2002-08 ,pp. : 409-413

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