Preparation of strontium titanate thin films by mirror-confinement-type electron cyclotron resonance plasma sputtering

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Elsevier

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Preparation of ZnF 2 and ZnF 2 -BaF 2 thin films by electron cyclotron resonance plasma-enhanced chemical vapor deposition

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Dependence of the properties of (Sr x Ti 1-x )O 3 thin films deposited by plasma-enhanced metal-organic chemical vapor deposition on electron cyclotron resonance plasma

By Lee J.S.   Song H.W.   Jun B.-H.   Kwack D.H.   Yu B.G.   Jiang Z.-T.   No K.  

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Conductivity of nanometer TiO 2 thin films by magnetron sputtering

By Gu G.-R.   He Z.   Tao Y.-c.   Li Y.-a.   Li J.-j.   Yin H.   Li W.-q.   Zhao Y.-n.  

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Characteristics of zinc oxide thin films prepared by r.f. magnetron-mode electron cyclotron resonance sputtering

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