Control of temperature coefficient of frequency in zinc oxide thin film bulk acoustic wave resonators at various frequency ranges

Author: Yoshino Y.   Takeuchi M.   Inoue K.   Makino T.   Arai S.   Hata T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.66, Iss.3, 2002-08, pp. : 467-472

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content