About an influence of Ar ion beam of very low energy on a-Si:H properties

Author: Kopani M.   Mikula M.   Jergel M.   Falcony C.   Ortega L.   Pinck E.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.67, Iss.1, 2002-09, pp. : 149-153

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Abstract