Composition and optical properties of silicon oxynitride films deposited by electron cyclotron resonance

Author： del Prado A.   San Andres E.   Martnez F.L.   Martil I.   Gonzalez-Daz G.   Bohne W.   Rohrich J.   Selle B.   Fernandez M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.67, Iss.3, 2002-09, pp. : 507-512

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