Compositional characterization of silicon nitride thin films prepared by RF-sputtering

Author： Vila M. Martn-Gago J.A. Munoz-Martn A. Prieto C. Miranzo P. Osendi M.I. Garca-Lopez J. Respaldiza M.A.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.67, Iss.3, 2002-09, pp. : 513-518

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