Author： Alexandrova S. Szekeres A. Halova E. Modreanu M.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.69, Iss.1, 2002-12, pp. : 385-389
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Optical and electrical properties of LPCVD silicon oxynitride films on silicon
By Szekeres A. Alexandrova S. Modreanu M. Cosmin P. Gartner M.
Vacuum, Vol. 61, Iss. 2, 2001-05 ,pp. :
Access to resources
Recommend
Alkali- and hydrogen ion sensing properties of LPCVD silicon oxynitride thin films
Thin Solid Films, Vol. 426, Iss. 1, 2003-02 ,pp. :
Optical properties of LPCVD silicon oxynitride
By Modreanu M. Tomozeiu N. Cosmin P. Gartner M.
Thin Solid Films, Vol. 337, Iss. 1, 1999-01 ,pp. :
By Perera R. Ikeda A. Hattori R. Kuroki Y.
Thin Solid Films, Vol. 423, Iss. 2, 2003-01 ,pp. :