Analysis of the biaxial strain state of Al-doped c-BN films using diffraction experiments with synchrotron radiation

Author： Linss V. Halm T. Hoyer W. Richter F. Schell N.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.70, Iss.1, 2003-02, pp. : 1-9

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