Investigation of strain distribution in LOCOS structures by dynamical simulation of LACBED patterns

Author: Wu F.   Armigliato A.   Balboni R.   Frabboni S.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.80, Iss.3, 1999-11, pp. : 193-201

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Abstract