Parameters determining crystallinity in -SiC thin films prepared by catalytic chemical vapor deposition

Author： Zhao Q.   Li J.C.   Zhou H.   Wang H.   Wang B.   Yan H.  

Publisher： Elsevier

ISSN： 0022-0248

Source： Journal of Crystal Growth, Vol.260, Iss.1, 2004-01, pp. : 176-180

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