Temporal evolution of plasma potential in a large-area pulsed dual-frequency inductively coupled discharge

Author： Mishra Anurag   Jin Seok Seo   Kyong Nam Kim   Geun Young Yeom  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.46, Iss.23, 2013-06, pp. : 235203-235211

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