Effect of nitrogen doping on the minority carrier lifetime in Czochralski silicon

Author： Cui C.   Yang D.   Yu X.   Ma X.   Li L.   Que D.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 373-378

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